Ionization device with mass spectrometer therewith

US10236169B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Michel Aliman · Oberkochen, DE
• Hin Yiu Anthony Chung · Blaustein, DE
• Gennady Fedosenko · Aalen, DE
• Ruediger Reuter · Aalen, DE
• Alexander Laue · Heidenheim, DE
• Achim von Keudell · Bochum, DE
• Marc Boeke · Hattingen, DE
• Thorsten Benter · Haan, DE
• Joerg Winter · Niederzier, DE
• Peter Awakowicz · Munich, DE
• Leonid Gorkhover · Ulm, DE

Key dates

• Filing date: Jun 8, 2017
• Grant date: Mar 19, 2019
• Expiry date: Jun 8, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J49/12
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.