Micromechanical device and method for the two-dimensional deflection of light
US10241323B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2017 |
| Grant date | Mar 26, 2019 |
| Priority date | — |
| Expiry date | Aug 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical device and a method for the two-dimensional deflection of light. The device includes a mirror unit having a mirror surface for deflecting light striking the mirror surface; the mirror unit being rotatably situated about a first axis within a first frame unit and being fastened to the first frame unit; the first frame unit being rotatably situated about a second axis within an actuator structure and being fastened to the actuator structure; the actuator structure including at least four piezoelectric actuator units; and the positions of the at least four piezoelectric actuator units being situated symmetrically with respect to the first axis and also with respect to the second axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.