System and method for electrodeless plasma ignition in laser-sustained plasma light source
US10244613B2 · kind B2 · utility
2Cited by
7References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2016 |
| Grant date | Mar 26, 2019 |
| Priority date | — |
| Expiry date | Sep 29, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/042
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.