Apparatus and method for beam diagnosis on laser processing optics

US10245683B2 · kind B2 · utility

Assignee

• Primes GmbH Messtechnik für die Produktion mit Laserstrahlung · DE

Inventors

• Reinhard Kramer · Pfungstadt, DE
• Otto Maerten · Dreieich, DE
• Stefan Wolf · Schwieberdingen, DE

Key dates

• Filing date: Feb 3, 2016
• Grant date: Apr 2, 2019
• Expiry date: Feb 26, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J9/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Apparatus for determining geometrical parameters of a laser beam includes an optical system, a device for output coupling radiation, a beam diagnostic device, and a reflector element. The optical system focuses the laser beam into a processing region. The device for output coupling radiation couples out radiation that runs through the optical system in a direction opposite to a direction of the laser beam. The reflector element has a first surface which is partially reflecting and curved, where the curvature is equal to a mean curvature of a wave front of the laser beam in a positioning region of the reflector element.