Measuring depth of a surface of a test object

US10247548B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Peter Rentschler · Calw, DE
• Anton Schick · Taufkirchen, DE

Key dates

• Filing date: Mar 25, 2015
• Grant date: Apr 2, 2019
• Expiry date: Apr 5, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/22
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for measuring the depth of a surface of a test object may include projecting a colored fringe pattern formed by a sequence of colored fringes onto a surface of the test object, and detecting and evaluating a fringe pattern reflected by the surface of the test object using an evaluation device. The colored fringe pattern and the evaluation device may be designed such that the depth of the surface of the test object is measured based on the sequence of colored fringes of the reflected fringe pattern and based on a sequence of fringe widths of the reflected fringe pattern.