Oil filled gage reference side protection
US10247632B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2016 |
| Grant date | Apr 2, 2019 |
| Priority date | — |
| Expiry date | Jul 9, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor can include a housing having a sense side cavity formed on a first side of the housing; a sense side diaphragm attached to the first side and over the sense side cavity, a sense die assembly placed in the cavity and attached to the housing; a reference side cavity formed in the housing, a reference side diaphragm attached to a second side of the housing and over the reference side cavity, and pin(s) electrically connected to the sense die assembly and extending outside the housing from the second side. The cavities are filled with oil. Manufacturing the pressure sensor can include mounting the sense die assembly onto the housing, attaching the sense side diaphragm to the first side of the housing, filling the cavities with oil, and attaching the reference side diaphragm on the second side of the housing and over the reference side cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.