System for observing objects
US10247668B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2015 |
| Grant date | Apr 2, 2019 |
| Priority date | — |
| Expiry date | Dec 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2223/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system is provided for observing objects on a substrate which includes a light source that emits polarized light rectilinearly along a first direction, a holder that receives said substrate having a surface and includes objects, wherein at least one of the holder or the substrate are translucent or opaque, a detector that collects the backscattered light from the interaction between the light emitting by the light source and the objects, a polarization splitter and a quarter-wave plate wherein the polarization splitter and the quarter-wave plate are arranged so that the polarization splitter directs light towards the substrate through the quarter-wave plate, and wherein the light forms a beam and the system modifies the size of the beam. The system thus allows one to observe objects on a non-transparent substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.