Electro-optic mach-zehnder modulator and method for fabricating an electro-optic mach-zehnder modulator

US10247998B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Karl-Otto Velthaus · Kleinmachnow, DE
• Detlef Hoffmann · Burns Lake, CA
• Marko Gruner · Berlin, DE

Key dates

• Filing date: Jun 20, 2012
• Grant date: Apr 2, 2019
• Expiry date: Jan 18, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F2201/127
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An electro-optic Mach-Zehnder modulator includes a first optical waveguide forming a first arm of the Mach-Zehnder modulator, and a second optical waveguide forming a second arm thereof. The first or second optical waveguide includes capacitive segments that are spaced apart from one another, each forming an electrical capacitor. A travelling wave electrode arrangement applies a voltage across the first or second optical waveguide. The travelling wave electrode arrangement includes waveguide electrodes arranged on the capacitive segments , an electrical line extending along a part of the first or second optical waveguide, the electrical line being arranged a distance from the waveguide electrodes, and connecting arrangements, each being assigned to one of the waveguide electrodes. Each connecting arrangement includes at least two connecting structures spaced apart from one another wherein the waveguide electrodes each are electrically connected to the electrical line via the assigned two connecting structures.