Pulsed plasma analyzer and method for analyzing the same
US10249485B2 · kind B2 · utility
2Cited by
3References
19Claims
0Family size
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Key dates
| Filing date | Oct 6, 2017 |
| Grant date | Apr 2, 2019 |
| Priority date | — |
| Expiry date | Oct 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/327
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A pulsed plasma analyzer includes a pulse modulator that controls an off-time of a pulsed plasma that includes a target radical, an optical spectrometer that measures optical emissions of the pulsed plasma after the off-time to determine optical emission data, and a concentration estimating module that estimates a concentration of the target radical during the off-time based on an initial optical emission value of the optical emission data that changes as a function of the off-time, and outputs an estimated concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.