Ultrasonic sensor
US10252296B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2018 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Apr 30, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An ultrasonic sensor includes a substrate in which an opening is formed; a vibration plate that is provided on the substrate so as to block the opening; and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode that are stacked on an opposite side of the opening of the vibration plate, in which when a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked is a Z direction, and a portion that is completely overlapped by the first electrode, the piezoelectric layer, and the second electrode in the Z direction is an active portion, a plurality of active portions are provided so as to face the each opening, and a columnar member is provided between the adjacent active portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.