Air curtain device
US10252299B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 2, 2016 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Oct 16, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67034
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An air curtain device is provided. The air curtain device comprises a pressure limiting module, and an air curtain body communicating with the pressure limiting module. The pressure limiting module is provided with a pressure limiting chamber, which has an air inlet connected with a gas source and a first air outlet communicating with the air curtain body. The pressure limiting chamber is provided with a pressure linking member, which is capable of changing a cross-sectional area of the first air outlet through which the gas flow passes in accordance with variation of pressure in the pressure limiting chamber, so that the gas flow output from the first air outlet has a pressure which is kept in a preset range. This ensures a stable flux for the gas flow output from the air curtain device, and increases the yield for fabricating the array substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.