Methods for separating halosilanes
US10252916B2 · kind B2 · utility
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3References
11Claims
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Assignee
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Key dates
| Filing date | Aug 31, 2015 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Dec 19, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/24
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Methods for separating halosilanes that involve use of a distillation column having a partition that divides the column into portions for producing three product fractions are disclosed. Methods and systems for producing silane by disproportionation of halosilanes that use such columns and methods for producing polycrystalline silicon are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.