Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
US10253777B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2014 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Jun 28, 2035 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/046
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.