Detection device, substrate holder and method for detecting position of substrate on substrate holder
US10254131B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 22, 2016 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Sep 29, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.