Pressure sensor

US10254185B2 · kind B2 · utility

Assignee

• InvenSense, Inc. · US

Inventors

• Johannes Schumm · Zürich, CH
• Andreas Reinhard · Zollikon, CH
• Thomas Kraehenbuehl · Zürich, CH
• Stefan Thiele · Kahl am Main, DE
• Rene Hummel · Baar, CH
• Chung-Hsien Lin · Hsinchu, TW
• Wang Su · East Patchogue, US
• Tsung Lin Tang · Hsinchu, TW
• Chia-Min Lin · Hsinchu, TW

Key dates

• Filing date: Mar 14, 2018
• Grant date: Apr 9, 2019
• Expiry date: Mar 14, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2224/11
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.