Patent · US Active

Opto-mechanical physical sensor with an improved sensitivity

US10254304B2 · kind B2 · utility

1Cited by
2References
15Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 23, 2016
Grant dateApr 9, 2019
Priority date
Expiry dateJan 20, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P15/0802
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A physical sensor comprising a substrate, a movable mass, said mass being able to be moved by an external force, a first optical resonator, a light wave guide for measurement and a light wave guide for detection, a rigid plate which are able to modify the optical resonance frequency of said optical resonator by moving closer and away the same, a lever arm rotatably hinged to the substrate by a pivot connection and the mass being movably integral with the transmitting means, the rigid plate being disposed relative to the mass and to the pivot connection such that the lever arm transmits to the rigid plate, in an amplified manner, the displacement of the mass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.