Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same
US10254333B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2015 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Nov 29, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A quality affecting factor generation method for a semiconductor manufacturing process is provided. The method includes receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, preprocessing the data of the customer evaluation result, determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.