Optical ring resonator structure with a backside recess
US10254485B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Sep 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/60
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical ring resonator structure with a backside recess is provided at a device. The device includes: a substrate having a device-side and a backside opposite the device-side; an optical ring resonator located on the device-side of the substrate; a heater having a shape complementary to the optical ring resonator, the heater positioned to heat the optical ring resonator; and one or more metal traces that connect at least to the heater, the metal traces configured to provide power to the heater and extending outward from the heater. The device further includes a recess on the backside of the substrate, the recess centered on the optical ring resonator, and having a diameter larger than both respective outer diameters of the optical ring resonator and the heater, the recess further extending laterally into a region of the one or more metal traces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.