Patent · US Active

Optimized sub-sampling in an electron microscope

US10256072B2 · kind B2 · utility

3Cited by

2References

21Claims

0Family size

Assignee

Battelle Memorial Institute · CH

Inventors

Andrew J. Stevens · Richland, US
Libor Kovarik · West Richland, US
Andrey V. Liyu · Pasco, US
Nigel D. Browning · Formby, GB

Key dates

Filing date	Aug 1, 2017
Grant date	Apr 9, 2019
Priority date	—
Expiry date	Aug 1, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2802
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

Disclosed are methods for optimized sub-sampling in an electron microscope. With regard at least to utilization of electron dose budgets, of time for acquisition of measurements, and of computing/processing capabilities, very high efficiencies can be achieved by informing and/or adapting subsequent sub-sampling measurements according to one or more earlier-acquired sparse datasets and/or according to analyzes thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.