Electrostatic holding device and method for the operation thereof, and charge transfer circuit

US10256130B2 · kind B2 · utility

Assignee

• BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO. · DE

Inventors

• Peter Preuss · Munich, DE
• Gunnar Heinze · Hofgeismar, DE
• Michael Fall · Berlin, DE
• Alexander Stein · Berlin, DE

Key dates

• Filing date: Nov 30, 2016
• Grant date: Apr 9, 2019
• Expiry date: Nov 11, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6833
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An electrostatic holding device (100) for holding component (1) by electrostatic holding forces includes clamp carrier (10) which has electrode device (11) and is configured for receiving component (1), voltage source device (20) for provision of a source charge current for charging clamp carrier (10), source switching device (30) which is arranged for a switchable connection of voltage source device (20) with electrode device (11), and at least one charge storage device (40, 40A, 40B) which has storage capacitor (41, 41A, 41B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier (10) in storage capacitor (41, 41A, 41B) and provide a storage charge current for charging clamp carrier (10). Also described is a method for operating holding device (100) and transfer circuit (200) for transmitting charges from working capacitor (201) to storage capacitor (202).