Electrostatic actuator and method for producing the same
US10256748B2 · kind B2 · utility
0Cited by
4References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 25, 2015 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Jan 22, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.