Patent · US Active

MEMS and/or NEMS dynamic pressure sensor with improved performances and microphone comprising such a sensor

US10257615B2 · kind B2 · utility

2Cited by

2References

23Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

Loic Joet · Grenoble, FR

Key dates

Filing date	Mar 17, 2016
Grant date	Apr 9, 2019
Priority date	—
Expiry date	Sep 4, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.