Acoustic transducer
US10257617B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 15, 2017 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Nov 15, 2037 |
Classification
- Technology area (CPC —)General
Abstract
Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.