Patent · US Active

System and method for laser-sustained plasma illumination

US10257918B2 · kind B2 · utility

0Cited by

8References

43Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Anant Chimmalgi · San Jose, US
Sebaek Oh · Millbrae, US
Joshua Wittenberg · Fremont, US
Lauren Wilson · San Jose, US
Rahul Yadav · Chandler, US
Ilya Bezel · Mountain View, US
Michael Navone · Cupertino, US
Anatoly Shchemelinin · Pleasanton, US

Key dates

Filing date	Sep 23, 2016
Grant date	Apr 9, 2019
Priority date	—
Expiry date	Sep 23, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH05G2/0084
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.