Patent · US Active

Method for in-line testing and surface analysis of test material with participation of raman spectroscopy

US10258239B2 · kind B2 · utility

0Cited by

5References

4Claims

0Family size

Inventors

Vishal Khosla · San Jose, US
Nick Doe · San Jose, US
Ming Chan · San Jose, US
Jun Xiao · Fremont, US
Gautam Char · San Jose, US

Key dates

Filing date	May 30, 2017
Grant date	Apr 16, 2019
Priority date	—
Expiry date	Nov 8, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/0826
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Proposed is a method for in-line testing and surface analysis of test material with participation of Raman spectroscopy wherein the apparatus has a column with a plurality of test units at least one of which is a wear test unit and another is a Raman spectrometer. The sample is located on a rotary table under the test units. By sequentially removing the material of the sample to a predetermined depth and then conducting the surface analysis with the use of the Raman spectrometer, it becomes possible to analyze distribution of the material components in the depth direction from the surface of the sample. delivery beams to the longitudinal axis of the Raman spectrometer

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.