Patent · US Active

Chamber seal for mass spectrometer

US10260632B2 · kind B2 · utility

1Cited by
11References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 17, 2014
Grant dateApr 16, 2019
Priority date
Expiry dateSep 17, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J49/26
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A mass spectrometer is disclosed comprising a first component, an annular vacuum chamber seal and a second component. The first component has a groove. The annular vacuum chamber seal comprises a main body portion and one or more blade or rib portions which protrude from the main body portion. The main body portion is located in the groove and the one or more blade or rib portions protrude above or beyond a surface of the first component. The second component is slid, in use, along the surface of the first component thereby deforming the one or more blade or rib portions so that the one or more blade or rib portions form a radial, diametric or piston seal between the first and second components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.