Raman spectrum-based object inspection apparatus and method
US10260949B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2017 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Nov 30, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B21/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Raman spectrum-based object inspection apparatus and a Raman spectrum-based object inspection method are disclosed. In one aspect, an example apparatus includes: a laser device configured to emit a laser; an optical guiding device configured to guide the laser to an object to be detected and collect a Raman scattering light from the object. The apparatus includes a spectrum generator configured to receive the Raman scattering light collected by the optical guiding device and generate a Raman spectroscopic signal. The spectrum analyzer is configured to analyze the Raman spectroscopic signal to obtain an inspection result. The apparatus includes a monitoring device configured to monitor a state of the object and control an object inspection operation depending on the state of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.