Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
US10260981B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2017 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | May 29, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a diaphragm suspended across a cavity in a substrate. A first group of piezoresistors is provided in the diaphragm, the piezoresistors of the first group being coupled to one another to form a first Wheatstone bridge having first positive and negative output nodes. A second group of piezoresistors is provided in the diaphragm, the piezoresistors of the second group being coupled to one another to form a second Wheatstone bridge having second positive and negative output nodes. The first negative output node of the first Wheatstone bridge is electrically connected to the second positive output node of the second Wheatstone bridge to directly chain the outputs of the Wheatstone bridges. The first and second Wheatstone bridges each produce an output signal as a function of an external pressure stimulus that is combined via the chained arrangement of the Wheatstone bridges to produce a composite output signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.