Magnetic field sensor with magnetic field shield structure and systems incorporating same

US10261138B2 · kind B2 · utility

Assignee

• NXP B.V. · NL

Inventors

• Stephan Marauska · Kaltenkirchen, DE
• Jörg Kock · Burgwedel, DE
• Mark Isler · Lebanon, US
• Harmut Matz · Hamburg, DE
• Dennis Helmboldt · Halstenbek, DE

Key dates

• Filing date: Jul 12, 2017
• Grant date: Apr 16, 2019
• Expiry date: Jul 12, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N52/101
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system comprises at least one magnetic field sensor having a magnetic sense element formed on a substrate. The sense element senses a magnetic field along a sense axis oriented in a first direction parallel to a surface of the substrate. A shield structure is formed on the substrate. The shield structure has first and second shield portions and the magnetic sense element is disposed between the shield portions. Each of the shield portions includes a body and first and second brim segments extending from opposing ends of the body. The body is aligned parallel to a second direction perpendicular to the first direction and parallel to the surface of the substrate. The brim segments are aligned substantially parallel to the first direction. The shield portions are arranged in mirror symmetry with the brim segments of each of the shield portions extending toward one another.