Cooling water jet pack for high power rotary cathodes
US10262843B2 · kind B2 · utility
0Cited by
8References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2016 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Nov 25, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.