Integrated circuit device
US10262937B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2017 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Aug 17, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/53266
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit device includes at least one fin-type active region, a gate line on the at least one fin-type active region, and a source/drain region on the at least one fin-type active region at at least one side of the gate line. A first conductive plug is connected to the source/drain region and includes cobalt. A second conductive plug is connected to the gate line and spaced apart from the first conductive plug. A third conductive plug is connected to each of the first conductive plug and the second conductive plug. The third conductive plug electrically connects the first conductive plug and the second conductive plug.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.