Contactor devices with carbon nanotube probes embedded in a flexible film and processes of making such
US10266402B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Nov 20, 2012 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Apr 7, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.