Capacitive pressure sensor and method for its production

US10267700B2 · kind B2 · utility

Assignee

• Endress+Hauser SE+Co. KG · DE

Inventors

• Rafael Teipen · Berlin, DE
• Benjamin Lemke · Berlin, DE
• Timo Kober · Potsdam, DE
• Lars Karweck · Binzen, DE
• Stefan Rummele-Werner · Lörrach, DE
• Thomas Zieringer · Schopfheim, DE

Key dates

• Filing date: Sep 2, 2015
• Grant date: Apr 23, 2019
• Expiry date: Oct 9, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/069
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.