High performance quartz crystal microbalance enhanced by microstructures for biological applications
US10268114B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Nov 9, 2015 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Apr 29, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0426
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Quartz crystal microbalance resonators are described, as are methods of making them using micron sized pillar array of polymethyl methacrylate fabricated on a QCM surface using a nanoimprint lithography process. Their use in any applications, including for example gas and liquid sensors and biosensors as well as other measurement applications, is also discussed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.