System and method for dispatching lot
US10268186B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2014 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Dec 31, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is disclosed that includes the operations below. A lot is dispatched for N process stages of process stages, according to arrival durations of the lot arrived at the N process stages and process durations of the lot predetermined to be processed at the N process stages, in which N is a positive integer. A first tool of tools at each one of the N process stages are assigned for the lot, in which the lot is configured to be dispatched to the first tool at a first process stage of the N process stages according to a first arrival duration of the arrival durations of the lot arrived at the first process stage and remain operation durations of the tools at the first process stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.