Patent · US Active

Device having at least two wafers for detecting electromagnetic radiation and method for producing said device

US10270001B2 · kind B2 · utility

0Cited by

2References

16Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Ingo Herrmann · Friolzheim, DE
Karl-Franz Reinhart · Weinsberg, DE
Tjalf Pirk · Stuttgart, DE

Key dates

Filing date	Aug 8, 2013
Grant date	Apr 23, 2019
Priority date	—
Expiry date	Oct 31, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/1461
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An arrangement of at least two wafers for detecting electromagnetic radiation, in particular far infrared radiation, comprises a first wafer and a second wafer. The first wafer includes a microsystem formed as a sensor array. The microsystem is configured to register electromagnetic radiation and provide a corresponding sensor signal. The second wafer includes an integrated circuit formed as an evaluation circuit that is coupled to the sensor array. The integrated circuit is configured to detect the electromagnetic radiation with the aid of the sensor signal provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.