Patent · US Active

Method for protecting a MEMS unit against infrared investigations and MEMS unit

US10273145B2 · kind B2 · utility

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20Claims

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Assignee

Robert Bosch GmbH · DE

Inventors

Michael Curcic · Stuttgart, DE
Oliver Willers · Korb, DE
Sven Zinober · Friolzheim, DE
Ulrich Kunz · Stuttgart, DE

Key dates

Filing date	Mar 26, 2018
Grant date	Apr 30, 2019
Priority date	—
Expiry date	Mar 26, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0292
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method is provided for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, a surface patterning being performed for at least one first area of a surface of the MEMS unit, the first area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90% of an infrared light incident upon it.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.