3d surface scanning white light axial chromatism device
US10274312B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2018 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Aug 22, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/18
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system and device that measures a specimen's surface profile by passing a bright white light source through a series of lenses which generate repeatable chromatic focal shift variations of wavelengths of white light for Z axis measurements. The movement of the sensor along an X-Y raster pattern is controlled by a X-directional and Y-directional scanner used in combination with X and Y actuators. The system and device translate the chromatic focal shifts into digital data which may then be used to both control the position of the lenses along the surface of the specimen and generate a 3D topographical images of the specimens being profiled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.