Semiconductor device and wafer with reference circuit and related methods
US10274395B2 · kind B2 · utility
1Cited by
14References
20Claims
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Key dates
| Filing date | Sep 1, 2017 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Sep 1, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device may include a semiconductor wafer, and a reference circuit carried by the semiconductor wafer. The reference circuit may include optical DUTs, a first set of photodetectors coupled to outputs of the optical DUTs, an optical splitter coupled to inputs of the optical DUTs, and a second set of photodetectors coupled to the optical splitter. The optical splitter is to be coupled to an optical source and configured to transmit a reference optical signal to the first set of photodetectors via the optical DUTs and the second set of photodetectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.