Capacitive sensor
US10274450B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2015 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Oct 4, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0047
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive environmental sensor and a method for determining the presence of a target substance (e.g. water) using differential capacitive measurements. The sensor includes a semiconductor substrate having a surface. The sensor also includes a plurality of sensor electrodes located on the surface. The electrodes are laterally separated on the surface by intervening spaces. The sensor further includes a sensor layer covering the electrodes. The sensor layer has a permittivity that is sensitive to the presence of the target substance. The surface of the substrate, in a space separating at least one pair of electrodes, includes a recess. The surface of the substrate, in a space separating at least one pair of electrodes, does not include a recess. The sensor may be provided in a Radio Frequency Identification (RFID) tag. The sensor may be provided in a smart building.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.