Micromechanical device including a movable element having a laser disposed thereon
US10274721B2 · kind B2 · utility
0Cited by
3References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2016 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Dec 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0071
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical device is described as having a stationary element (100) and a deflectable element. The invention relates to a light source that is situated on the deflectable element. Also described is a micromechanical scanner including a micromechanical device having a movable element with a light source disposed thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.