Patent · US Active

Optical module with an adjustable optical element

US10274845B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Ivan Ivanov · Steinhöring, DE
Taoufik Mbarek · Harsewinkel, DE
Mathias Huesing · Aachen, DE
Burkhard Corves · Zug, CH

Key dates

Filing date	Apr 21, 2011
Grant date	Apr 30, 2019
Priority date	—
Expiry date	Oct 19, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70833
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.