Patent · US Active

Automated and accurate high-throughput slider-level flatness inspection

US10281268B1 · kind B1 · utility

0Cited by
21References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 20, 2018
Grant dateMay 7, 2019
Priority date
Expiry dateApr 20, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG11B5/6082
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method includes receiving an image of a surface of a slider bar from an interferometer, where the slider bar includes at least two sliders, and where the image includes image data according to at least two image data channels for a slider bar surface and the at least two sliders. The method also includes generating a slider bar map of the surface of the slider bar based upon the image data of the image, where the slider bar map includes at least two data channels and ascertaining a plurality of individual slider surface maps based on a number of sliders included on the slider bar, where the ascertaining is also based upon the slider bar map having the at least two data channels. The method also includes segmenting the slider bar map according to the plurality of individual slider surface maps.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.