Patent · US Active

Device and method for estimating a flow of gas in an enclosure maintained at reduced pressure in relation to the gas

US10281304B2 · kind B2 · utility

0Cited by
7References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 6, 2013
Grant dateMay 7, 2019
Priority date—
Expiry dateAug 8, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N15/0826
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Method for estimating a gas flow in an enclosure maintained in a low pressure regimen relative to the gas, including:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.