Method and device for generating a plasma excited by a microwave energy in the electron cyclotron resonance (ECR) domain, in order to carry out a surface treatment or produce a coating around a filiform element
US10283322B2 · kind B2 · utility
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4References
12Claims
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Key dates
| Filing date | Mar 26, 2015 |
| Grant date | May 7, 2019 |
| Priority date | — |
| Expiry date | Apr 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to the process, the filiform component is continuously linearly moved through magnetic dipoles arranged opposite each other and around a tube constituting a treatment chamber, and the microwave energy is introduced between at least two magnetic dipoles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.