Patent · US Active

Photodetection device and system having avalanche amplification

US10283651B2 · kind B2 · utility

2Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 22, 2017
Grant dateMay 7, 2019
Priority date
Expiry dateNov 22, 2037

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/50
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A photodetection device includes a semiconductor substrate; and a pixel including a first semiconductor region having signal charges as majority carriers, and an electrode disposed on the semiconductor substrate with a dielectric member interposed therebetween. The pixel is configured to detect a signal based on avalanche-amplified electric charges. A quenching circuit configured to suppress a current generated by the avalanche amplification is connected to the first semiconductor region. A second semiconductor region of a conductive type opposite that of the first semiconductor region is disposed under the electrode and in a front surface of the semiconductor substrate. When a predetermined potential is supplied to the electrode, an inversion layer is formed in the second semiconductor region, and the inversion layer is electrically connected to the first semiconductor region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.