Acoustic resonator device with at least one air-ring and frame
US10284173B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2016 |
| Grant date | May 7, 2019 |
| Priority date | — |
| Expiry date | Apr 28, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02007
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one metal frame disposed on a bottom surface of the bottom electrode having a thickness that ranges from about 10% to about 75% of a thickness of the bottom electrode in a central region of the bottom electrode. The thickness of the metal frame improves heat dissipation out of the acoustic resonator device while also improving structural stability of the acoustic resonator device without detrimentally affecting its performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.