Mask tension welding device for thin film deposition
US10286416B2 · kind B2 · utility
3Cited by
16References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | May 14, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A mask tension welding device for welding a mask for thin film deposition on a mask frame, the mask tension welding device including a tension unit to pull the mask in one direction; a pressurizing unit to press the mask to the mask frame, the pressuring unit including an upper housing, a lower housing coupled to the upper housing, a window between the upper housing and the lower housing, a space in the lower housing into which a fluid is injectable, and an inlet and an outlet to provide a passage through which the fluid is injected and discharged; and a laser welding unit to weld the mask and the mask frame to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.