In-situ heated disposition of parylene to enhance pore penetration into silicone
US10287451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Sep 26, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249958
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A composition of matter is described in which a porous material, such as polydimethylsiloxane (PDMS), is coated with parylene N, C, D, or AF-4 by vapor deposition polymerization while a temperature of the porous material's surface being coated is heated to between 60° C. and 120° C., or 80° C. and 85° C., during deposition. The parylene forms nano roots within the porous material that connect with a conformal surface coating of parylene. In some embodiments, a watertight separation chamber in an integrated microfluidic liquid chromatography device is fabricated by heating tunnels in micro-fabricated PDMS and depositing parylene within the heated tunnels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.