Apparatus and method for MEMS resonant sensor arrays
US10288487B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 10, 2017 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Aug 10, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method is provided. The method comprises: transmitting a periodic chirp to at least two pixels of a MEMS sensor array; determining a resonant frequency of each MEMS resonant sensor receiving the periodic chirp; determining the change in resonant frequency of each MEMS resonant sensor receiving the periodic chirp; determining a power level incident upon each pixel receiving the periodic chirp. In one embodiment, the method further comprises calibrating the MEMS sensor array. In another embodiment, calibrating comprises generating a reference resonant frequency for each MEMS resonant sensor. In a further embodiment, determining the power level comprises determining a difference between the determined resonant frequency and the reference resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.